■ Grinding of silicon, carbide, ceramics, glass, germanium, gallium arsenide and other brittle materials

■ Grinding of Si/Cu, resins

■ GNX200B

■ GNX200BH (can be used for grinding of SiC material)

■ GNX 300B (can correspond to 12" wafer maximum)

■ VG401MKII (can be used for grinding of ceramic chuck)

Okamoto has its own high-precision core spindle and high strength, high wear resistance core component casting factory

■ Okamoto has the core part of the grinder - spindle technology I strength

-Okamoto is the core component supplier of the world's major precision grinder

-Due to the technical blockade, the high-end core components cannot be sold to Chinese Mainland

-AL2O3, ALN and other materials have very high hardness, which requires very high rigidity for core components such as the spindle

■ Okamoto is the most professional equipment supplier of electrostatic chuck products

-For ultra pure AL2O3, ALN and other materials, especially large size ultra smooth grinding has great irreplaceable

■ Okamoto has the uniqued technology of

-It can be used for targeted grinding of local parts of special workpieces such as high-precision large size workpieces

-Flexible response to workpieces such as

-The grinding precision is higher, more stable and more flexible

■ Other manufacturers

■ No grinding load fluctuations

■ In-Process measurement compatible(Two-probe) type

■ Fracture layer and peripheral chipping is minimised

Obvious advantages in operating costs

-High yield rate: significantly due to other manufacturers in the same industry

-High stability and long service life of core components such as main shaft: application practice of world famous manufacturers

-The grinding wheel has low wear and higher use efficiency: three core technologies of abrasive | particle size | bond+global use performance

■ The grinding wheel spindle adopts high rigid air bearing and high-power grinding wheel, so the grinding rigidity is greater

■ High grinding precision and good stability

■ High rigid support

-The mechanical unit supporting the grinding spindle is made of high rigid iron castings. The mechanism can bear the mechanical impact during heavy grinding

-Spindle vertical guideway High rigidity linear roller guideway - larger contact area, large load bearing, high sensitivity

■ Adopting double grinding spindles, index table, robot loading and unloading, greatly improving the production efficiency

The worktable adopts high rigid air bearing, and achieves stable work through AC servo motor drive and worm speed change

Examples of grinding with high-pressure jet dress.

■ Si/Cu grinding

■ Resin grinding

Spindle speed: 1800min - (120Hz) max

Main shaft bearing: air bearing

Spindle fast speed feed: 180mm/min

Spindle grinding speed: maximum 999um/min

Workbench diameter: 400mm Φ

Workbench bearing: air bearing

Vacuum chuck: ceramic chuck

Fixture: vacuum

Table speed: 1-200min-1

Workbench motor: AC servo motor 3.0Kw