GaAs VGF Furnace 

■ Less EPD 4 inch VGF furnace & annealing （MAT-150VGFHQ2)

■ Less EPD 6 inch VGF furnace & annealing（MAT-200VGFHQ2)

Supporting equipment:

■ PBN 4 inch crucible annealing furnace

■ PBN 6 inch crucible annealing furnace

■ Quartz tube welder

■ Ampoule sealed vacuum furnace

■ Quartz ampoule tube cutting machine

■ Quartz tube reforming unit